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Electronic Specialty Gases & Electronic ChemicalsNitrogen Trifluoride (NF₃)Tungsten Hexafluoride (WF₆)Hexafluoro-1,3-butadiene (C₄F₆)Trichlorosilane (SiHCl₃)Dichlorosilane (SiH₂Cl₂)Silicon Tetrachloride (SiCl₄)Tetraethyl Orthosilicate (TEOS)Ultra-High-Purity Ammonia (NH₃)Ultra-High-Puri
Electronic Specialty Gases & Electronic Chemicals
Nitrogen Trifluoride (NF₃)
Tungsten Hexafluoride (WF₆)
Hexafluoro-1,3-butadiene (C₄F₆)
Trichlorosilane (SiHCl₃)
Dichlorosilane (SiH₂Cl₂)
Silicon Tetrachloride (SiCl₄)
Tetraethyl Orthosilicate (TEOS)
Ultra-High-Purity Ammonia (NH₃)
Ultra-High-Purity Hydrogen (H₂)
High-Purity Carbon Monoxide (CO)
High-Purity Carbon Dioxide (CO₂)
High-Purity Methane (CH₄)
Ultra-High-Purity Ammonium Hydroxide (NH₄OH)
High-Purity Hydrogen Chloride (HCl)
High-Purity Chlorine (Cl₂)
High-Purity Carbonyl Sulfide (COS)
Ultra-High-Purity Hydrochloric Acid (HCl)
Hydrogen Bromide (HBr)
Trimethylsilane
Tetramethylsilane
Off-Gas Recovery Projects
- 6N / 5.5N Purity Grade